Aalto University


  • Professor Dr. Sami Franssila

    Professor Dr. Sami Franssila:

    Professor Dr. Sami Franssila received his BSc and MSc degrees in physics from the University of Helsinki, and PhD degree from the School of Electrical Engineering, Helsinki University of Technology, with a thesis on plasma etching. He was a Research Scientist with the Technical Research Centre of Finland (VTT) Microelectronics from 1986 to 1998 and with IMEC, Belgium, in 1993–1994. He has been with the Helsinki University of Technology (renamed Aalto University in 2010) since 1998, where he is currently at the Department of Chemistry and Materials Science. He has worked on CMOS, MEMS, thin films, nanotechnology, and microfluidics. He is the holder of five patents and has authored or co-authored over 150 original peer-reviewed journal articles, 5 review articles, 5 book chapters (H-index 40). He is the author of successful textbook Introduction to Microfabrication (2nd edition, John Wiley, 2010) and editor of Handbook of silicon based MEMS materials and technologies (Elsevier, 2nd edition, 2015). He is currently a Professor of materials science, with research interests in materials and fabrication technologies for chemical and biological micro- and nanodevices.